Apparatus and method for arranging devices for processing

Metal fusion bonding – With means to handle work or product – Including means to orient work or position work portion...

Reexamination Certificate

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C228S212000, C029S759000

Reexamination Certificate

active

07726540

ABSTRACT:
An apparatus is provided for arranging for processing a semiconductor device having surface components on its surface. A device support comprising a set of protrusions for contacting a surface of the semiconductor device supports the semiconductor device on a plane. The protrusions are arranged and positioned such that they avoid contact with the surface components on the surface. In order to grip the semiconductor device supported on the plane, a clamping device having a first set of clamps is configured for gripping the semiconductor device along a first axis and a second set of clamps is configured for gripping the semiconductor device along a second axis perpendicular to the first axis.

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