Coating processes – Centrifugal force utilized
Reexamination Certificate
2006-09-05
2006-09-05
Padgett, Marianne (Department: 1762)
Coating processes
Centrifugal force utilized
C427S512000, C427S553000, C118S052000
Reexamination Certificate
active
07101588
ABSTRACT:
A liquid material is applied by spin coating it onto a first main surface of a flat plate to form a coating of the liquid material thereon. The flat plate includes a second main surface which is opposite to the first main surface and a hole which passes through the flat plate. The application of the liquid material is carried out using an inner guide member, which is placed in the hole, and the spin coating is carried out while the flat plate is placed on a stage such that the inner guide member is placed generally adjacent to an inner peripheral side surface of the flat plate and an upper surface of the inner guide member and the first main surface are located at generally the same level. Thereby, a coating is obtained which extends on the upper surface of the inner guide member and the first main surface of the flat plate.
REFERENCES:
patent: 4875434 (1989-10-01), Maejima et al.
patent: 5069156 (1991-12-01), Suzuki
patent: 5294257 (1994-03-01), Kelly et al.
patent: 6077349 (2000-06-01), Kikuchi
patent: 6232247 (2001-05-01), Gordon et al.
patent: 6327793 (2001-12-01), Gurer et al.
patent: 6349086 (2002-02-01), Nishida et al.
patent: 6527860 (2003-03-01), Yoshihara et al.
patent: 6706359 (2004-03-01), Mino et al.
patent: 6866887 (2005-03-01), Chen et al.
patent: 2001/0018093 (2001-08-01), Decre
patent: 2001/0052320 (2001-12-01), Komaki et al.
patent: 2003/0101929 (2003-06-01), Yoshihara et al.
patent: 2004/0180141 (2004-09-01), Koyayashi et al.
patent: 2004/0219326 (2004-11-01), Komaki et al.
patent: 2005/0048202 (2005-03-01), Komaki et al.
patent: 03-001525 (1991-01-01), None
patent: 05-283326 (1993-10-01), None
patent: 05-283329 (1993-10-01), None
patent: 2001-307391 (2001-11-01), None
patent: 01/63606 (2001-08-01), None
JPO machine translation and English absract of JP 2001-307391, pub. Nov. 2, 2001 to Yoshio et al.
Abe Shinya
Hayashi Kazuhiro
Hisada Kazuya
Ito Eiichi
Ohno Eiji
Padgett Marianne
Wenderoth , Lind & Ponack, L.L.P.
LandOfFree
Apparatus and method for applying liquid material to form a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for applying liquid material to form a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for applying liquid material to form a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3593241