Apparatus and method for applying diamond-like carbon coatings

Details Apparatus and method for applying diamond-like carbon coatings Apparatus and method for applying diamond-like carbon coatings

2008-01-29

2008-01-29

Turner, Archene (Department: 1775)

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

C118S7230ER, C118S7230IR, C204S192150, C427S249700, C427S249150, C427S249170, C427S255230, C427S255280, C427S577000

Reexamination Certificate

active

07323219

ABSTRACT:
The invention relates to a coating and apparatus and method for applying the same, said coating including Diamond Like Carbon (DLC) applied by chemical vapor deposition using a pulsed DC biased power supply, typically having an initial metal layer and followed by a transitional metal carbide layer and a DLC layer. The depths and transitions between the materials can be selected to suit requirements. The apparatus also includes the use of an arrangement with at least one electrode with an RF power supply and the selective control of the power supplies to the electrode and substrates is used to improve the efficiency of application.

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