Apparatus and method for analyzing capacitance of insulator

Details Apparatus and method for analyzing capacitance of insulator Apparatus and method for analyzing capacitance of insulator

2005-12-13

2005-12-13

Hirshfeld, Andrew H. (Department: 2854)

Electricity: measuring and testing

Plural, automatically sequential tests

C324S765010, C324S071600

Reexamination Certificate

active

06975102

ABSTRACT:
According to the present invention, there is provided an insulator capacitance analyzer for analyzing C-V characteristics of a first MIS structure having unknown capacitance, which includes: a capacitance structure having known capacitance and configured so as to be serially connectable to the first MIS structure; and a measuring section for measuring synthesis capacitance of the serially-connected first MIS structure and capacitance structure.

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Phisics 3 Spring 1989; Lab 1; Capacitance Measurements.
Japanese Office Action dated Jan. 21, 2005 (w/out English translation thereof).
Abstract; Motohiro et al; “C-V Charatcteristic Conversion Method in Contractless C-V Measuring Device”; JP 06-112289; Apr. 22, 1994.

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