Apparatus and method for an improved wafer handling system for c

Details Apparatus and method for an improved wafer handling system for c Apparatus and method for an improved wafer handling system for c

1986-05-06

1988-05-17

McCall, James T.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

108145, 248421, B65G 5300, F16M 1300

Patent

active

047447125

ABSTRACT:
The instant invention relates to a loading system for loading semiconductor wafers into a diffusion tube. The combination of a track and a loader trolley designed for the track is disclosed, along with mechanisms for coarse and fine adjustments of the height of the loader platform of the loader trolley. These adjustments can be made without any shims or spacers.

REFERENCES:
patent: 399220 (1889-03-01), Timroth
patent: 2829863 (1958-04-01), Gibson
patent: 3917211 (1975-11-01), Daunderer et al.
patent: 4116548 (1978-09-01), Persson

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