Apparatus and method for alignment of adjacent surfaces

Details Apparatus and method for alignment of adjacent surfaces Apparatus and method for alignment of adjacent surfaces

1990-08-06

1991-09-17

Cuchlinski, Jr., William A.

Geometrical instruments

Gauge

Collocating

33533, 33557, 33613, G01B 524, G01B 328

Patent

active

050481959

ABSTRACT:
An apparatus for aligning adjacent surfaces for coplanarity and angle is described. The apparatus comprises a base plate, a plurality of support legs coupled to the base plate, a plurality of depth gauges coupled to the base plate, an angle coupled to the base plate, and leveling means coupled to an inclined surface. The inclined surface of the angle plate slopes towards the plurality of depth gauges. The inclined surface has a predetermined angle. A method for aligning first and second adjacent surfaces for coplanarity and relative angle is also described. The alignment apparatus is placed on a flat surface. The apparatus is calibrated so that all of the plurality of depth gauges read a first value. The apparatus is placed on the first and second adjacent process modules such that the support legs rest on the first adjacent process module and the plurality of depth gauges rest on the second adjacent process module. The first and second process modules are aligned such that the plurality of depth gauges read the first value. The first and second process modules are aligned until the leveling means indicates level.

REFERENCES:
patent: 3533167 (1970-10-01), Thompson et al.
patent: 4150490 (1979-04-01), Sluke
patent: 4392641 (1983-07-01), Dearman
patent: 4586264 (1986-05-01), Zatezalo
patent: 4693012 (1987-09-01), Cesna
patent: 4955142 (1990-09-01), Rieck

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