Work holders – Relatively movable jaws – Jaw features
Patent
1976-08-30
1979-02-27
Werner, Frank E.
Work holders
Relatively movable jaws
Jaw features
214 1BS, 214152, 269 21, 269 58, 294 64R, 29271, 29406, 29743, 29759, 219121L, 219121LM, 219158, B65G 4790
Patent
active
041414560
ABSTRACT:
The device includes an alignment station at which an operator can align a wafer under a microscope. Once the wafer is properly aligned, a transfer chuck is brought into position above the wafer and aligned with alignment pins located in fixed positions at the alignment station. The wafer is then fixed to the transfer chuck and released from the alignment station. The transfer chuck is moved into proper alignment with alignment pins at a remote operation station, such as an automatic scribing station. The invention allows the operator to view the wafer with semiconductor devices facing the operator and provides for flipping the wafer over through the use of the transfer chuck so that the laser scriber can scribe the wafer on the side away from the semiconductor devices.
REFERENCES:
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 3611561 (1971-12-01), Dosier
patent: 3816700 (1974-06-01), Weiner et al.
patent: 4042119 (1977-08-01), Hassan et al.
Keen et al.,--"Photosensitive System For Orienting a Translucent Substrate"--Digest #21-Western Electric, Jan. 1971 --pp. 17-19.
Finu et al.--"Bernoulli Wafer Load & Unloading System"--pp. 427 and 428--vol. 16, No. 2, Jul. 1973 IBM Tech. Disc.
Asman Sanford J.
Christoffersen H.
RCA Corp.
Werner Frank E.
Williams R. P.
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