Apparatus and method for aligning devices on carriers

Details Apparatus and method for aligning devices on carriers Apparatus and method for aligning devices on carriers

2007-08-21

2007-08-21

Estrada, Michelle (Department: 2823)

Metal working

Barrier layer or semiconductor device making

C206S701000, C206S557000, C206S706000, C206S713000, C438S106000, C438S107000

Reexamination Certificate

active

11031024

ABSTRACT:
An apparatus and method are provided for aligning a plurality of semiconductor devices placed on a carrier. Alignment guides are located adjacent to each device in use, and arranged such that they correspond to a desired alignment of each semiconductor device. For alignment, the semiconductor devices are held by a positioning device comprising a plurality of holders, each holder being configured to generate a force to hold a semiconductor device. Actuators are also provided that are operative to move the positioning device and holders to bias the semiconductor devices against the alignment guides to orientate the semiconductor devices until they are aligned with said alignment guides.

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