Geometrical instruments – Gauge – Straightness – flatness – or alignment
Patent
1990-04-06
1991-07-30
Will, Thomas B.
Geometrical instruments
Gauge
Straightness, flatness, or alignment
33645, G01B 2124, H01L 2168
Patent
active
050350625
ABSTRACT:
An apparatus for centering semiconductor loading and unloading arms is described. The apparatus comprises a cap and a ring. The cap comprises a first plate, substantially in the shape of an electrode, a lip affixed to the edge of the first plate for holding the first plate stationary in a lateral direction, and a pin affixed to a top of the first plate such that the pin is perpendicular to the first plate. The ring comprises a second plate substantially in the shape of a semiconductor material to be placed on the electrode, an aperture in the second plate, the diameter of the aperture being the same as the diameter of the pin, and a collar surrounding the aperture, wherein the collar is for holding the second plate.
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Kordel Jan A.
Leonov Mark A.
Intel Corporation
Will Thomas B.
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