Apparatus and method for aligning and focusing an image of a ret

Details Apparatus and method for aligning and focusing an image of a ret Apparatus and method for aligning and focusing an image of a ret

1989-12-27

1991-03-26

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2742

Patent

active

050033450

ABSTRACT:
A projection system provides a primary mirror with a thin nearly concentric shell which functions as a first mirror at shorter wavelengths for exposure purposes and functions as a second mirror surface at longer wavelengths for alignment purposes. The coating on the front surface of the shell is reflective to the exposing wavelengths and transmissive to the alignment illumination, and the coating on the back of the shell is reflective to the alignment wavelengths. This provides good focus and alignment of the images over two spectral regions.

REFERENCES:
patent: 4370054 (1983-01-01), Isohata et al.
patent: 4422754 (1983-12-01), Isohata et al.
patent: 4572659 (1986-02-01), Omata
patent: 4682885 (1987-07-01), Torigoe
patent: 4757354 (1988-07-01), Sato et al.

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