Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2011-04-26
2011-04-26
Wilkins, III, Harry D (Department: 1723)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S272000, C204S237000, C366S335000
Reexamination Certificate
active
07931786
ABSTRACT:
Reactors with agitators and methods for processing microfeature workpieces with such reactors. The agitators are capable of obtaining high, controlled mass-transfer rates that result in high quality surfaces and efficient wet chemical processes. The agitators generate high flow velocities in the fluid and contain the high energy fluid proximate to the surface of the workpiece to form high quality surfaces when cleaning, etching and/or depositing materials to/from a workpiece. The agitators also have short stroke lengths so that the footprints of the reactors are relatively small. As a result, the reactors are efficient and cost effective to operate. The agitators are also designed so that electrical fields in the processing solution can effectively operate at the surface of the workpiece.
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Gregory J. Wilson and Paul R. McHugh,Unsteady Numerical Simulation of the Mass Transfer Within a Reciprocating Paddle Electroplating Cell,Proceedings of the 205th Meeting of the ECS, Symposium E1, Electrochemical Processing in ULS1 and MEMS, Electrodeposition, Abstract 166, San Antonio, TX (2004).
McHugh Paul R.
Wilson Gregory J.
Woodruff Daniel J.
Ohriner Kenneth H.
Perkins Coie LLP
Semitool Inc.
Wilkins, III Harry D
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