Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent
1995-06-20
1996-12-10
Breneman, R. Bruce
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
For crystallization from liquid or supercritical state
117200, 117208, C30B 3500
Patent
active
055826423
ABSTRACT:
A method of laterally adjusting the position of a pull wire of a crystal pulling machine to dampen pendular motion of the pull wire during production of a monocrystal comprises: placing a close-fitting guide around the pull wire; rotating the pulling chamber about the axis Z.sub.1 to rotate both the pull wire and the monocrystal supported by the pull wire; sensing the lateral position of a portion of the pull wire; adjusting the lateral position of the guide in response to the sensed position of the pull wire to dampen pendular motion of the pull wire during production of a monocrystal.
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Korb Harold
Lauher Verlin A.
Schrenker Richard G.
Williams Dick S.
Breneman R. Bruce
Garrett Felisa
MEMC Electronic Materials , Inc.
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