Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-10-24
2006-10-24
Rachuba, M. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S008000, C451S011000, C451S262000
Reexamination Certificate
active
07125313
ABSTRACT:
An apparatus for abrading a workpiece comprises a first plate assembly having a first surface for supporting a workpiece and a second plate assembly having a second surface for engaging the workpiece to abrade a portion thereof. A displacement shaft is mounted for movement with respect to the upper and lower plate assemblies and has a first end configured to engage the upper plate assembly. A feedback assembly is coupled to the displacement shaft for moving the displacement shaft to substantially maintain a predetermined load exerted on the displacement shaft by the upper plate assembly.
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Cheprasov Sergey
Zelenski Aleksander
Ingrassia Fisher & Lorenz P.C.
Novellus Systems Inc.
Rachuba M.
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