Apparatus and method for a modular electron beam system for the

Details Apparatus and method for a modular electron beam system for the Apparatus and method for a modular electron beam system for the

1997-04-24

1999-06-01

Anderson, Bruce

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

313420, H01J 3730

Patent

active

059090324

ABSTRACT:
A modular electron beam device is disclosed, the device being housed in a modular enclosure containing a power supply subsystem coupled to provide power to an electron beam tube. The enclosure is shaped to permit stacking of plural such modular units in a way that the stripe-shaped beam emitted from each of the units completely irradiates a surface to be treated. Beams may lie on different lines but the combined beams sweep out a width on a surface which is a continuous span. In an alternate embodiment of the invention, the modular unit comprises a plurality of electron beam units, each comprising an electron tube and a filament and bias supply to power the tube. A single high voltage stack is common to the plural tube/filament/bias sub-units. A daisy-chain arrangement allows for the single high voltage stack to power all of the tube units. In yet another embodiment, the modular unit comprises a plurality of electron tubes powered by a single power supply.

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