Apparatus and crucible for vapor deposition

Details Apparatus and crucible for vapor deposition Apparatus and crucible for vapor deposition

1991-12-03

1992-08-25

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118725, C23C 1424

Patent

active

051409399

ABSTRACT:
The apparatus comprises a thermally insulating enclosure, first, second, and third diffusers for constituting first, second, and third isothermal heating zones respectively around first, second, and third compartments of a removable closed crucible designed to contain a source material in the first compartment and a substrate in the second compartment. The first, second, and third diffusers are thermally independent from one another by construction, each of them having a U-shaped section to surround the first, second, and third compartments of the crucible respectively.
The first, second, and third compartments are disposed in non-aligned manner along an angled line such that the angles between the first, second, and third compartments provide thermal decoupling of radiant energy between the compartments.

REFERENCES:
patent: 3343518 (1967-09-01), Westeren
patent: 3632429 (1972-01-01), Maeda
patent: 3705567 (1972-12-01), Emels
patent: 3828722 (1974-08-01), Reuter
patent: 4204893 (1980-05-01), Cox
patent: 4211182 (1980-07-01), Rosnowski

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