Apparatus and a method for dynamically tuning a particle sensor

Details Apparatus and a method for dynamically tuning a particle sensor Apparatus and a method for dynamically tuning a particle sensor

1993-05-17

1995-06-13

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356338, G01N 1506

Patent

active

054245583

ABSTRACT:
A method and an apparatus allow dynamic tuning of a particle sensor. The particle sensor provides output signals indicating particle detection to a controller, which includes an amplifier whose bandwidth and gain can be adjusted. The bandwidth and the gain of the amplifier are adjusted in accordance with predetermined optimal performance levels under the varying process conditions in which the particle sensor is placed. The optimal signal-to-noise ratio is maintained by adjusting the bandwidth and the gain according to both expected particle velocities and whether a plasma glow is present in the exhaust line for carrying gasses out of a process chamber.

REFERENCES:
patent: 3873918 (1975-03-01), Talbert
patent: 4607228 (1986-08-01), Reif

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