Apparatus and a method for detecting the generation of dust part

Details Apparatus and a method for detecting the generation of dust part Apparatus and a method for detecting the generation of dust part

1994-11-30

1996-09-10

Williams, Hezron E.

Measuring and testing

Miscellaneous

738655, 454187, G01N 1500, B01L 104

Patent

active

055534961

ABSTRACT:
For reducing the equipment cost for monitoring dust particles and improving the operation efficiency in a clean room, a plurality of sampling tubes each having a plurality of perforations formed in the side thereof and along the extension thereof are disposed under the floor board of the clean room so as to extend in X and Y directions. The perforations are for sucking the air together with dust particles discharged from the clean room through openings formed in the regions defined in rows and columns on the floor board. The perforations are formed corresponding to each of the region. The sampling tubes are sequentially selected to be connected to laser particle counters dedicated for the X direction and Y direction, respectively, and the dust particles sent via each of the sampling tubes are counted. The generation of dust particles in the clean room is located by associating the measurement data of the dust particles with the order of the sampling tubes in the sequential connection thereof to the laser particle counters.

REFERENCES:
patent: 4475379 (1984-10-01), Jinotti
patent: 4693175 (1987-09-01), Hashimoto
patent: 5169418 (1992-12-01), Honda et al.
patent: 5207614 (1993-05-01), Passadore
patent: 5259812 (1993-11-01), Kleinsek
patent: 5369981 (1994-12-01), Merz et al.

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