Apparatus and a method for carrying wafers

Conveyors: power-driven – With means to facilitate working – treating – or inspecting... – Means to transfer a load back and forth between the mainline...

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29759, 432 6, 414417, B65G 4700

Patent

active

048566411

ABSTRACT:
A wafer carrying apparatus comprises a heat treatment plate for heat treating a wafer, the treatment plate having a plurality of through-holes spaced apart from each other at a prescribed distance. A plurality of pins are disposed to protrude from and to be retractable below the main surface of the heat treatment plate, through the through-holes. The tips of pins are kept at the same height and a pair of spaced elongated members, for example wires, whose relative spacing and position are changeable are effective for carrying and placing the wafer onto and removing the wafer from atop the pins.

REFERENCES:
patent: 3973665 (1976-08-01), Giammanco
patent: 4336438 (1982-06-01), Uehara et al.
patent: 4518078 (1985-05-01), Garrett
patent: 4534695 (1985-08-01), Stump et al.
patent: 4591044 (1986-05-01), Osami et al.
patent: 4705951 (1987-11-01), Layman et al.
patent: 4721198 (1988-01-01), Yajima et al.
Mori, Published 5/1986, United States Statutory Invention Registration, Reg. #H67.

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