Apparatus and a method for alignment verification having an opaq

Details Apparatus and a method for alignment verification having an opaq Apparatus and a method for alignment verification having an opaq

1991-10-30

1992-12-08

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356401, G01V 904

Patent

active

051700581

ABSTRACT:
The present invention relates generally to a new apparatus and a method for alignment verification. More particularly, the invention encompasses an apparatus that allows the imaging on a structure from opposite sides while the imaging masks are on the opposite sides of the structure, and the masks and the structure are all aligned with each other. This apparatus also discloses means that can verify that the two imaging masks that are on the opposite sides of each other are aligned with each other during imaging processing.

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patent: 4937459 (1990-06-01), Ina
"Metal Mask Dedicated Carrier" IBM Technical Disclosure Bulletin, vol. 34, No. 1, pp. 321-324 (Jun. 1991).

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