Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1997-04-08
1999-01-12
Le, Que
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250216, 250237G, 359888, G01J 350
Patent
active
058594248
ABSTRACT:
Because of diffraction effects caused by slits or apertures in optical measurement systems, the radiation energy which is directed towards a particular region on a sample will be spread over a larger area than desirable. By employing an apodizing filter in the radiation path in such system, diffraction tails of the system will be reduced. The apodizing filter preferably has a pattern of alternating high transmittance areas and substantially opaque areas where the locally averaged transmittance function is an apodizing function. In the preferred embodiment, the locally averaged transmittance function varies smoothly and monotonically from the periphery to the center of the filter.
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Carter Joseph R.
Johnson Kenneth C.
Norton Adam E.
Kla-Tencor Corporation
Le Que
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