Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-08-22
2006-08-22
Toatley, Gregory (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S486000
Reexamination Certificate
active
07095504
ABSTRACT:
An interferometry apparatus comprises one or more beam generators, a detector, and a plurality of optical paths along which one or more beams of light propagate. Disposed along at least one of the optical paths is an apodization mask to shape one of the beams.
REFERENCES:
patent: 4514850 (1985-04-01), Holmes et al.
patent: 5090803 (1992-02-01), Ames et al.
patent: 5291570 (1994-03-01), Filgas et al.
patent: 5452392 (1995-09-01), Baker et al.
patent: 6483982 (2002-11-01), Takahashi
patent: 6646723 (2003-11-01), Dubovitsky et al.
patent: 6710880 (2004-03-01), Zhao
patent: WO 3021319 (2003-03-01), None
U.S. Appl. No. 10/787,662, filed Feb. 25, 2004, Ames et al.
U.S. Appl. No. 10/349,758, filed Jan. 22, 2003, Ames et al.
U.S. Appl. No. 10/293,209, filed Nov. 12, 2002, Ames et al.
U.S. Appl. No. 10/180,086 filed Jun. 27, 2002, Ames et al.
Ames, Lawrence, et al., “SIM external metrology beam launcher (QP) development,” Lockheed Martin Advanced Technology Ctr./ Lockheed Martin Jet Propulsion Lab, SPIE Conference, Kona Hawaii, 2002 [4852-55].
Halverson, Peter G., et al., “Techniques for the Reduction of Cyclic Errors in Laser Metrology Gauges for the Space Interferometry Mission,” presented at American Society for Precision Engineering ASPE's 16th Annual Meeting, Nov. 10-15, 2001.
Zhao, Feng, et al. “Development of Sub-nanometer Racetrack Laser Metrology for External Triangulation Measurement for the Space Interferometry Mission”, presented at American Society for Precision Engineering ASPE's 16th Annual Meeting, Nov. 10-15, 2001.
Ames Lawrence L.
Dutta Kalyan
Detschel Marissa J
Lockheed Martin Corporation
McDermott Will & Emery LLP
Toatley Gregory
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