Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-12-12
2006-12-12
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S071000
Reexamination Certificate
active
07148953
ABSTRACT:
A projection optical system suitable for projection photolithography is disclosed. The projection optical system is a modified Wynne-Dyson system capable of imaging a large field over both a narrow and a broad spectral range. The projection optical system includes a positive lens group arranged adjacent to but spaced apart from a concave mirror along the mirror axis on the concave side of the mirror. The system also includes a variable aperture stop so that the system has a variable NA. The projection optical system has two or more common foci within an ultraviolet exposure band and a third common focus in a visible alignment band. A projection photolithography system that employs the projection optical system is also disclosed.
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Jones Allston L.
Rutledge D.
Ultratech, Inc.
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