Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1989-04-28
1990-08-07
Willis, Davis L.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
350507, H01J 314
Patent
active
049470345
ABSTRACT:
A near field optical microscopy method and apparatus eliminates the necessity of an aperture for scanning a sample surface and greatly reduces the detected background signal. A small dimension tip, on the order of atomic dimension, is disposed in close proximity to the sample surface. A dither motion is applied to the tip at a first frequency in a direction substantially normal to the plane of the sample surface. Dither motion is simultaneously applied to the sample at a second frequency in a direction substantially parallel to the plane of the sample surface. The amplitude of the motions are chosen to be comparable to the desired measurement resolution. The end of the tip is illuminated by optical energy. The scattered light from the tip and surface is detected at the difference frequency for imaging the sample surface at sub-wavelength resolution without the use of an aperture. Alternatively, the tip is maintained stationary and the sample undergoes motion in the two directions.
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Wickramasinghe Hemantha K.
Williams Clayton C.
Feig Philip J.
International Business Machines - Corporation
Le Que Tan
Willis Davis L.
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