Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-03-15
2011-11-22
Nguyen, Hung Henry (Department: 2882)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C355S067000
Reexamination Certificate
active
08064122
ABSTRACT:
A dark border region may be integrated with a window covering a patterning device, such that light from an active area of the patterning device passes through the dark border region, while excess light is removed from the system by the dark border region. The dark border region may be, for example and without limitation, a light-absorbing material, a wedged light reflective coating that reflects light out of the lithography system, or an interference grating that causes destructive interference in unwanted light to remove the unwanted light from the system. The dark border region may overlap a similar dark border region located on the surface of on the patterning device to optimize a width of the total dark border region without sacrificing excessive valuable real-estate area on the surface of the patterning device or compromising alignment tolerance levels of the lithography system.
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English Language Abstract for JP 2006-011065 A, published Jan. 12, 2006; 1 page.
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ASML Holding N.V.
Gordon Steven H Whitesell
Nguyen Hung Henry
Sterne, Kessler, Goldstein & Fox P.L.L.C
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