Aperture structure for charged beam exposure

Details Aperture structure for charged beam exposure Aperture structure for charged beam exposure

1983-07-19

1985-10-29

Anderson, Bruce C.

Chemistry of carbon compounds

Miscellaneous organic carbon compounds

C-metal

250396R, 2504922, H01J 3700

Patent

active

045502587

ABSTRACT:
In an aperture for a charged particle beam exposure apparatus, the outside edges of fine wires are located inside the individual sides of an opening formed in a conductive sheet so that an opening smaller than the opening of the conductive sheet is defined by the fine wires.

REFERENCES:
patent: 3736425 (1973-05-01), Chernow
patent: 3911281 (1975-10-01), Ihme
patent: 4053808 (1977-10-01), Peacock
patent: 4220866 (1980-09-01), Taumann et al.
patent: 4258265 (1981-03-01), Sami
patent: 4263514 (1981-04-01), Reeds, Jr.

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