Antivibration support for Czochralski crystal growing systems

Details Antivibration support for Czochralski crystal growing systems Antivibration support for Czochralski crystal growing systems

1997-01-24

1999-10-19

Hiteshew, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117208, 117216, C30B 3500

Patent

active

059682671

ABSTRACT:
The uniformity of solid crystals grown by pulling a seed crystal from a molten charge material in a crucible is increased by eliminating vibration by supporting a housing for the solid crystal on a vibration isolator which rests on a supporting floor. Vibration isolators may also be placed between a crucible lift and rotation mechanism and the supporting floor. The crystal pull head for pulling the seed crystal also can be isolated from the remainder of the apparatus by vibration isolators.

REFERENCES:
patent: 4662860 (1987-05-01), Iseler et al.
patent: 5725661 (1998-03-01), Fusegawa et al.

Affiliated with

Also associated with

Rating

Antivibration support for Czochralski crystal growing systems does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Antivibration support for Czochralski crystal growing systems, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Antivibration support for Czochralski crystal growing systems will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2050818