Antistatic solution for microlithic measurement

Details Antistatic solution for microlithic measurement Antistatic solution for microlithic measurement

1994-02-18

1995-01-03

Beck, Shrive

Coating processes

Centrifugal force utilized

427314, 427316, 427508, B05D 100

Patent

active

053784987

ABSTRACT:
An antistatic solution is disclosed to aid in the measurement of patterned resists by scanning electronic microscopes. The solution comprises a quaternary ammonium salt and a suitable solvent. The anion of the salt is selected from the group consisting of saccharinate, nitrate, sulfates, alkyl sulfates and alkoxylate. The four groups of the cation are selected from the group consisting of alkyl and alkyl derivatives.

REFERENCES:
patent: 3933516 (1976-01-01), Mackey
patent: 4115120 (1978-09-01), Dyer
patent: 4214035 (1980-07-01), Heberger
patent: 4369208 (1983-01-01), Okunaka
patent: 4711816 (1987-12-01), Wittnebel
patent: 4973338 (1990-11-01), Gaeta
patent: 4980205 (1990-12-01), Haskell

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