Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2006-03-28
2006-03-28
Peng, Kuo-Liang (Department: 1712)
Stock material or miscellaneous articles
Composite
Of silicon containing
C428S446000
Reexamination Certificate
active
07018717
ABSTRACT:
New organic-based radiation absorbing compositions are provided that are suitable for use as an antireflective coating composition (“ARC”) for an overcoated photoresist. These compositions also serve effectively as a hard mask layer by exhibiting a sufficient plasma etch selectively from an undercoated dielectric layer.
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Corless Peter F.
Edwards Angell Palmer & & Dodge LLP
Peng Kuo-Liang
Shipley Company L.L.C.
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