Antireflective film for photoelectric devices

Details Antireflective film for photoelectric devices Antireflective film for photoelectric devices

1985-02-22

1987-03-10

Demers, Arthur P.

Stock material or miscellaneous articles

Composite

Of inorganic material

136243, 136256, 136257, 20419226, 428212, 428218, 428698, 428700, 428702, 428704, B32B 900, B32B 1900

Patent

active

046490884

ABSTRACT:
An antireflective film (7, 8) for photoelectric devices comprises at least a layer having a refractive index being the largest on the side abutting on the light receiving surface (2a) or the light emitting surface of a photoelectric device and continuously decreasing according to the distance outward from said side.

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"Semiconductors and Semimetals", Harold J. Hovel, Thomas J. Watson Research Center, IBM Corp., vol. II, Solar Cells, pp. 203-208.
"Antireflection Layers for GaAs Solar Cells", N. D. Arora et al, J. Appl. Phys. 53, (Dec. 12, 1982), pp. 8839-8846.
"Plasma-Enhanced CVD Silicon Nitride Antireflection Coatings for Solar Cells", C. C. Johnson et al, Solar Energy, vol. 31, No. 4, 1983, pp. 355-358.
"Physicochemical Properties of Chemical Vapor-Deposited Silicon Oxynitride from a SiH.sub.4 -CO.sub.2 -NH.sub.3 -H.sub.2 System", A. K. Gaind et al, J. Electrochem. Soc., Solid-State Science and Technology, Jan. 1978, pp. 139-145.
"Optical Properties of Reactively Sputtered Ta.sub.2 O.sub.5 Films", F. Rubio et al, J. Vac. Sci. Technol., 21 (4), Nov./Dec. 1982, pp. 1043-1045.
"Anti-Reflection Coatings for Thin-Film Polycrystalline CdS/Cu.sub.2 S Solar Cells", J. A. Bragagnolo et al, J. Vac. Sci. Technol., 18 (2), Mar. 1981, pp. 364-367.

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