Antireflective coating compositions

Details Antireflective coating compositions Antireflective coating compositions

1996-06-11

1999-03-23

Hamilton, Cynthia

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

525154, 5253303, 5253304, 5253305, 5253306, 4302711, G03F 711, C08L 3308, C08L 3310, C08L 3304

Patent

active

058861025

ABSTRACT:
The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.

REFERENCES:
patent: 4060656 (1977-11-01), Naka et al.
patent: 4362809 (1982-12-01), Chen et al.
patent: 4370405 (1983-01-01), O'Toole et al.
patent: 4576898 (1986-03-01), Hoffman et al.
patent: 4910122 (1990-03-01), Arnold et al.
patent: 5693691 (1997-12-01), Flaim et al.

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