Antireflective coating, coating composition, and...

Details Antireflective coating, coating composition, and... Antireflective coating, coating composition, and...

2007-09-18

2007-09-18

Moore, Margaret G. (Department: 1712)

Stock material or miscellaneous articles

Composite

Of silicon containing

C528S034000, C528S035000, C528S036000, C106S287130

Reexamination Certificate

active

11244154

ABSTRACT:
An antireflective coating having improved alkali resistance is formed on a transparent substrate of synthetic resin as an outermost layer and has a three-dimensional crosslinked structure containing F and Si atoms. The crosslinked structure is composed of Si—O—Si and Si—C2H4—(CF2)n—C2H4—Si linkages wherein n is 4 or 6; the molar ratio of F atoms to Si atoms is from 8.0 to 10.0; and perfluoroalkyl groups account for 90 to 100 mol % of all monovalent organic substituent groups attached to silicon atoms. The antireflective coating can exhibit such alkali resistance that when a droplet of a 1 wt % NaOH aqueous solution is rested on the antireflective coating for 30 minutes and then wiped off, the appearance of the coating is kept unchanged from the initial appearance.

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