Antireflection film forming composition, antireflection film...

Details Antireflection film forming composition, antireflection film... Antireflection film forming composition, antireflection film...

2011-06-21

2011-06-21

Moore, Margaret G (Department: 1765)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C428S447000

Reexamination Certificate

active

07964684

ABSTRACT:
An antireflection film forming composition, includes: a polymerized product of Compound (I) having m number of RSi(O0.5)3units, in which m stands for an integer of from 8 to 16, and Rs each independently represents a non-hydrolyzable group, with the proviso that at least two of Rs each represents a vinyl- or ethynyl-containing group, wherein each of the RSi(O0.5)3units is linked to another RSi(O0.5)3unit while having an oxygen atom in common and constitutes a cage structure, and wherein, of solids contained in the composition, the polymerized product obtained by a polymerization reaction of Compound (I) amounts to 60 mass % or greater and Compound (I) amounts to 15 mass % or less.

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patent: 2000-334881 (2000-12-01), None
patent: 2007 92019 (2007-04-01), None

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