Antireflection film forming composition, antireflection film...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...

Reexamination Certificate

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Reexamination Certificate



An antireflection film forming composition, includes: a polymerized product of Compound (I) having m number of RSi(O0.5)3units, in which m stands for an integer of from 8 to 16, and Rs each independently represents a non-hydrolyzable group, with the proviso that at least two of Rs each represents a vinyl- or ethynyl-containing group, wherein each of the RSi(O0.5)3units is linked to another RSi(O0.5)3unit while having an oxygen atom in common and constitutes a cage structure, and wherein, of solids contained in the composition, the polymerized product obtained by a polymerization reaction of Compound (I) amounts to 60 mass % or greater and Compound (I) amounts to 15 mass % or less.

patent: 6252030 (2001-06-01), Zank et al.
patent: 7732038 (2010-06-01), Naito et al.
patent: 2004/0120915 (2004-06-01), Yang et al.
patent: 2005/0107541 (2005-05-01), Bening
patent: 2007/0054135 (2007-03-01), Morita et al.
patent: 2000-334881 (2000-12-01), None
patent: 2007 92019 (2007-04-01), None


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