Antireflection coatings for silicon solar cells

Details Antireflection coatings for silicon solar cells Antireflection coatings for silicon solar cells

1985-05-13

1987-09-01

Weisstuch, Aaron

Batteries: thermoelectric and photoelectric

Photoelectric

Cells

136261, 357 30, 357 52, 357 91, 2504922, 427 74, 437 2, 437 20, H01L 3106, H01L 3118

Patent

active

046910778

ABSTRACT:
An improved optical match to a subsequently-formed antireflection overcoating is achieved by providing a silicon solar cell substrate with an altered surface layer that is formed by an ion-beam process, and has a refractive index between about 3.4 and about 3.6 at 633 nm and between about 3.6 and about 3.8 at 442 nm. The surface layer is formed by adding between about 2% and about 10% methane, by volume, to the hydrogen flow in a Kaufman type broad beam ion source.

REFERENCES:
patent: 4557037 (1985-12-01), Hanoka et al.

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