Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1997-11-24
1999-12-21
Geist, Gary
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
556 64, 556 71, C07F 970
Patent
active
060051272
ABSTRACT:
An antimony/Lewis base adduct of the formula SbR.sub.3.L, wherein each R is independently selected from C.sub.1 -C.sub.8 alkyl, C.sub.1 -C.sub.8 perfluoroalkyl, C.sub.1 -C.sub.8 haloalkyl, C.sub.6 -C.sub.10 aryl, C.sub.6 -C.sub.10 perfluoroaryl, C.sub.6 -C.sub.10 haloaryl, C.sub.6 -C.sub.10 cycloalkyl, substituted C.sub.6 -C.sub.10 aryl and halo; and L is a Lewis base ligand coordinating with SbR.sub.3. The adducts of the invention are useful as metal source compositions for chemical vapor deposition, assisted chemical vapor deposition (e.g., laser-assisted chemical vapor deposition, light-assisted chemical vapor deposition, plasma-assisted chemical vapor deposition and ion-assisted chemical vapor deposition), ion implantation, molecular beam epitaxy, and rapid thermal processing, to form antimony or antimony-containing films.
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Baum Thomas H.
Bhandari Gautam
Todd Michael A.
Advanced Technology & Materials Inc.
Geist Gary
Hultquist Steven J.
Vollano Jean F.
Zitzmann Oliver A. M.
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