Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state
Patent
1996-11-15
2000-03-07
Chang, Joni
Semiconductor device manufacturing: process
Making device array and selectively interconnecting
Using structure alterable to conductive state
438467, 438600, H01L 2182
Patent
active
060339381
ABSTRACT:
Treatment of the positive electrode interface of an antifuse provides significantly improved on-state reliability. Treatments include, but are not limited to, a plasma etch using carbon tetrafluoride (CF.sub.4), a sputter clean using Argon, and wet chemical treatments using dimethyl formamide (and water) or a resist developer.
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Hart Michael J.
Karpovich Yakov
Voogel Martin L.
Casey Michael J.
Chang Joni
Harms Jeanette S.
Xilinx , Inc.
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