Static information storage and retrieval – Read only systems – Fusible
Reexamination Certificate
2007-04-17
2007-04-17
Hur, Jung (John) H. (Department: 2824)
Static information storage and retrieval
Read only systems
Fusible
C365S102000, C365S225700, C257S068000, C257S071000, C257SE23147, C257SE21008
Reexamination Certificate
active
10232205
ABSTRACT:
A capacitor has a tantalum oxynitride film. One method for making the film comprises forming a bottom plate electrode and then forming a tantalum oxide film on the bottom plate electrode. Nitrogen is introduced to form a tantalum oxynitride film. A top plate electrode is formed on the tantalum oxynitride film. Embodiments include a method of operating an antifuse, comprising applying a voltage across electrodes of a capacitor having a tantalum oxynitride film and forming a hole in the tantalum oxynitride film.
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Al-Shareef Husam N.
DeBoer Scott Jeffrey
Gealy Dan
Thakur Randhir P. S.
Hur Jung (John) H.
Schwegman Lundberg Woessner & Kluth P.A.
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