Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2005-08-30
2005-08-30
Oen, William (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
Reexamination Certificate
active
06935181
ABSTRACT:
A capacitive vacuum sensor includes an elastic diaphragm electrode and a rigid fixed electrode opposite the elastic diaphragm electrode. An internal space is defined between the elastic diaphragm electrode and the rigid fixed electrode. The elastic diaphragm electrode deflects elastically in response to any change in the pressure of a gas applied on the elastic diaphragm electrode, and the capacitive vacuum sensor is responsive to any change in the capacitance between the elastic diaphragm electrode and the rigid fixed electrode that may occur in accordance with the deflection of the elastic diaphragm electrode so that it can measure the pressure of the gas. The vacuum sensor can include an anticorrosive diaphragm electrode that can resist the corrosive action of the reactive gas when it is exposed to such gas, and can be fabricated by the micromachining technology.
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K. Hatanaka et al., “Silicon Diaphragm Capacitive Vacuum Sensor,” 1995, Technical Digest of The 13thSensor Symposium, pp. 37-44, no month.
Esashi Masayoshi
Kitamura Yasuyuki
Miyashita Haruzo
Anelva Corporation
Esashi Masayoshi
Oen William
Wenderoth , Lind & Ponack, L.L.P.
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