Anti-wafer breakage detection system

Details Anti-wafer breakage detection system Anti-wafer breakage detection system

1998-04-09

1999-09-14

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

25055912, 414935, G01N 2186

Patent

active

059526700

ABSTRACT:
A circuit configured to generate an error signal that may be used to disable a loading mechanism (such as a loading mechanism in a wafer sorter). The circuit comprises a wafer sense circuit configured to generate a first pulse in response to a wafer passing a detection point, a pulse generator circuit configured to generate (i) a second pulse in response to a transition (e.g., a positive transition) of the first pulse and (ii) a third pulse in response to a transition (e.g., a negative transition) of the first pulse. An error detection block may be configured to generate an error signal in response to (i) the first pulse, (ii) the second pulse and (iii) the third pulse.

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