Anti-vibration system for exposure apparatus

Details Anti-vibration system for exposure apparatus Anti-vibration system for exposure apparatus

2005-03-01

2005-03-01

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000

Reexamination Certificate

active

06862077

ABSTRACT:
An anti-vibration system includes air dampers of high natural frequency, in a compact space. A pair of air dampers are disposed with their driving directions opposed to each other, and inside pressures of these dampers are variably controlled so as to set the natural vibration frequency.

REFERENCES:
patent: 4473292 (1984-09-01), Mayer
patent: 4927119 (1990-05-01), Frost
patent: 4976415 (1990-12-01), Murai et al.
patent: 5121898 (1992-06-01), Yasuda et al.
patent: 5193788 (1993-03-01), Richter et al.
patent: 5356110 (1994-10-01), Eddy
patent: 5446519 (1995-08-01), Makinouchi
patent: 5502899 (1996-04-01), Yamaguchi et al.
patent: 5549269 (1996-08-01), Gertel et al.
patent: 5610686 (1997-03-01), Osanai
patent: 5765800 (1998-06-01), Watanabe et al.
patent: 5876012 (1999-03-01), Haga et al.
patent: 5881987 (1999-03-01), Hara
patent: 5931441 (1999-08-01), Sakamoto
patent: 5979882 (1999-11-01), Osterberg
patent: 6021991 (2000-02-01), Mayama et al.
patent: 6036162 (2000-03-01), Hayashi
patent: 6082508 (2000-07-01), Davis
patent: 6170622 (2001-01-01), Wakui et al.
patent: 10-89403 (1989-04-01), None
patent: 1-188241 (1989-07-01), None
patent: 3-213744 (1991-09-01), None
patent: 3-219141 (1991-09-01), None
patent: 3-245932 (1991-11-01), None
patent: 4-019438 (1992-01-01), None
patent: 4-254025 (1992-09-01), None
patent: 6-66346 (1994-03-01), None
patent: 6-074297 (1994-03-01), None
patent: 6-117487 (1994-04-01), None
patent: 6-147256 (1994-05-01), None
patent: 6-267823 (1994-09-01), None
patent: 8-35537 (1996-02-01), None

Affiliated with

Also associated with

Rating

Anti-vibration system for exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Anti-vibration system for exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Anti-vibration system for exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3419148