Anti-reflective film and optical element having...

Details Anti-reflective film and optical element having... Anti-reflective film and optical element having...

2007-11-27

2007-11-27

Lavarias, Arnel (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Multilayer filter or multilayer reflector

C359S588000, C359S586000, C359S589000, C355S071000

Reexamination Certificate

active

11148249

ABSTRACT:
In an anti-reflective film including alternating layers of high refractive-index layers and low refractive-index layers, by designing such that a designed central wavelength λ0is within a wavelength range of 141 nm to 189 nm, and that when the first to eighth layers as counted from a substrate have optical film thicknesses d1to d8respectively, the equations of:in-line-formulae description="In-line Formulae" end="lead"?0.45λ0≦d1≦0.65λ0;in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?0.05λ0≦d2≦0.20λ0;in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?0.29λ0≦d3≦0.49λ0;in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?0.01λ0≦d4≦0.15λ0;in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?0.05λ0≦d5≦0.20λ0;in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?0.23λ0≦d6≦0.28λ0;in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?0.23λ0≦d7≦0.28λ0; andin-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?0.23λ0≦d8≦0.28λ0in-line-formulae description="In-line Formulae" end="tail"?are satisfied, the anti-reflective film can be formed so as to have a low reflectance for a light incident at such a large angle as 30 degrees or more, without increasing the whole thickness of the film.

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