Anti-reflective coating composition

Compositions – Light transmission modifying compositions

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Details

252587, 252589, 427161, 427162, F21V 900, B05B 500, B05D 506

Patent

active

057729255

ABSTRACT:
An anti-reflective coating composition comprising a polyimide dissolved in an organic solvent is used to form an anti-reflective coating beneath a chemical amplification type resist layer. The composition allows a fine resist pattern to be formed with high accuracy in a convenient, efficient, reproducible manner.

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