Compositions – Light transmission modifying compositions
Patent
1997-07-10
1998-06-30
Tucker, Philip C.
Compositions
Light transmission modifying compositions
252587, 252589, 427161, 427162, F21V 900, B05B 500, B05D 506
Patent
active
057729255
ABSTRACT:
An anti-reflective coating composition comprising a polyimide dissolved in an organic solvent is used to form an anti-reflective coating beneath a chemical amplification type resist layer. The composition allows a fine resist pattern to be formed with high accuracy in a convenient, efficient, reproducible manner.
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Ishihara Toshinobu
Kaneko Ichiro
Oikawa Katsuyuki
Takeda Yoshihumi
Watanabe Satoshi
Shin-Etsu Chemical Co. , Ltd.
Tucker Philip C.
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