Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Processes of preparing a desired or intentional composition...
Patent
1997-04-03
1998-09-29
Cain, Edward J.
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Processes of preparing a desired or intentional composition...
524319, C08K 509
Patent
active
058146946
ABSTRACT:
A water-soluble coating composition for forming a layer to be placed on the upper surface of a resist is provided without use of Freons. The material includes an aqueous solution containing a) at least one water-soluble polymer selected from the group consisting of poly(N-vinylpyrrolidone) homopolymers and water-soluble copolymers of N-vinylpyrrolidone and other vinyl monomers, b) at least one fluorine-containing organic acid, and c) at least one amino acid derivative. The film formed through use of the material of the invention serves as both an anti-reflective film and a protective film. The material of the present invention provides a number of advantages in the formation of resist patterns, including excellent film-forming properties, excellent dimensional accuracy and aligning accuracy, simple and easy handling, high productivity, and good reproducibility.
REFERENCES:
patent: 4491628 (1985-01-01), Ito et al.
patent: 5310619 (1994-05-01), Crivello et al.
W. Hinsberg et al., "Journal of Photopolymer Science and Technology", vol. 6, Num. 4, pp. 535-546 (1993).
T. Kumada et al., "Study on Over-Top Coating of Positive Chemical Amplification Resists for KrF Excimer Laser Lithography", vol. 6, Num. 4 (1993).
Y. Hatakenaka et al., Proceedings of the 1994 Spring Conference of the Society of Applied Physics, p. 567.
Ishihara Toshinobu
Nagura Shigehiro
Watanabe Satoshi
Cain Edward J.
Shin-Etsu Chemical Co. , Ltd.
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