Radiation imagery chemistry: process – composition – or product th – Imaged product – Including resin or synthetic polymer
Patent
1995-06-01
1997-10-07
Duda, Kathleen
Radiation imagery chemistry: process, composition, or product th
Imaged product
Including resin or synthetic polymer
4302711, 430311, 430313, G06F 700
Patent
active
056746482
ABSTRACT:
A light absorbing medium to be interposed under photosensitive layers, such as a photo-resist for integrated circuit "chips" to eliminate defects caused by reflected light, has a polymer vehicle which can penetrate into small depressions of a substrate and form a thin, smooth and uniform coating. The coating includes a light absorbing dye. This light absorbing layer is imageable in the process. The light absorbing material eliminates many of the defects caused by reflected light resulting in increased sharpness of the images in the photo-resist. The material reduces the losses due to defects and increases the yield of useable product.
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Arnold John W.
Brewer Terry L.
Punyakumleard Sumalee
Brewer Science Inc.
Duda Kathleen
Renner Edward H.
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