Anti-reflection coating layer and design method thereof

Details Anti-reflection coating layer and design method thereof Anti-reflection coating layer and design method thereof

2008-01-22

2008-01-22

Boutsikaris, Leonidas (Department: 2872)

Optical: systems and elements

Light interference

Produced by coating or lamina

C359S589000

Reexamination Certificate

active

07321467

ABSTRACT:
An anti-reflection coating layer is formed between an under layer and a photoresist layer. The anti-reflection coating is characterized in a refraction value (n) of the anti-reflection coating layer, wherein n is a constant, and an extinction coefficient (k) of the anti-reflection coating layer, increasing in gradient toward the under layer. Thus, the substrate reflectivity with respect to different under layers can be substantially equal to 0 by controlling the k of the anti-reflection coating layer.

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