Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – At least one aryl ring which is part of a fused or bridged...
Reexamination Certificate
2005-02-08
2005-02-08
Cain, Edward J. (Department: 1714)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
At least one aryl ring which is part of a fused or bridged...
C524S551000, C524S567000, C524S599000, C524S606000, C524S609000, C524S611000, C524S612000
Reexamination Certificate
active
06852791
ABSTRACT:
An anti-reflection coating-forming composition is provided. This composition includes a polymer and a solvent. The polymer has a structural unit represented by the formula (1):wherein R1is a monovalent atom other than a hydrogen atom or a monovalent group, and n is an integer of 0-4, provided that when n is an integer of 2-4, a plural number of R1's are the same or different; R2and R3are each a monovalent atom or group; and X is a bivalent group. The anti-reflection coating formed from this composition has a high antireflective effect, does not generate intermixing with a resist film, and enables a good resist pattern profile excellent in resolution and precision in cooperation with a positive or negative resist.
REFERENCES:
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Kawaguchi Kazuo
Shimokawa Tsutomu
Tanaka Masato
Cain Edward J.
DLA Piper Rudnick Gray Cary U.S. LLP
JSR Corporation
Kelber Steven B.
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