Anti-reflection and anti-oxidation coatings for diamond

Stock material or miscellaneous articles – Composite – Of silicon containing

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428333, 428698, 428699, 428701, 428702, 4289088, 359359, 359360, B32B 904

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054727871

ABSTRACT:
Coatings for a diamond surface of an optical element control reflections and oxidation at the surface. Transmissive element coatings effective in the infrared and at up to 800.degree. C. have a first layer of amorphous hydrogenated silicon deposited directly on the diamond and have a second layer of aluminum nitride, yttrium oxide, hafnium oxide or other refractory oxide deposited directly on the first layer. The first layer may be relatively thin and for adhesion only with the second layer constructed of an oxide and having a thickness selected to control reflection, or the thicknesses of both layers may be selected together to control reflection with the proportion of hydrogen in the first layer varied to select its refractive index.

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M. B. Moran, K. A. Klemm, & L. F. Johnson: "Antireflection/Antioxidation tings & Polishing Results For PECVD Diamond Optics"; Proceedings of Applied Diamond Conf. 1991, Auburn University, Auburn, Ala.; 19 Aug. 1991.
T. H. Allen, W. T. Beauchamp, & B. P. Hichwa; "Enhanced Optical Thin-Film Materials" pp. 105-109; Photonics Spectra; Mar. 1991.
M. Lesser: "Antireflection Coatings For Silicon Charge-Coupled Devices"; pp. 911-915; Optical Engineering; Sep. 1987/vol. 26 No. 9.
P. Baumeister & O. Arnon; "Use of Hafnium Dioxide in Multilayer Dielectric Reflectors for the Near UV"; pp. 439-444; Applied Optics; Feb. 1977/vol. 16 No. 2.

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