Anti-fuse structures and methods for making same

Details Anti-fuse structures and methods for making same Anti-fuse structures and methods for making same

1991-06-04

1992-06-09

Quach, T. N.

Fishing, trapping, and vermin destroying

437 52, 437192, 437193, 437922, 148DIG55, H01L 21311, H01L 2190

Patent

active

051206790

ABSTRACT:
An anti-fuse structure characterized by a substrate, an oxide layer formed over the substrate having an opening formed therein, an amorphous silicon material disposed within the opening and contacting the substrate, and oxide spacers lining the walls of a recess formed within the amorphous silicon. The spacers prevent failures of the anti-fuse structures by covering cusps formed in the amorphous silicon material. The method of the present invention forms the above-described anti-fuse structure and further solves the problem of removing unwanted spacer material from areas outside of the anti-fuse structure locations.

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patent: 5011791 (1991-04-01), Mastroianni
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