Fluid sprinkling – spraying – and diffusing – Rigid fluid confining distributor – Orifice in separable disc or plate
Reexamination Certificate
2005-12-13
2005-12-13
Scherbel, David A. (Department: 3752)
Fluid sprinkling, spraying, and diffusing
Rigid fluid confining distributor
Orifice in separable disc or plate
C239S589000, C239S590500
Reexamination Certificate
active
06974094
ABSTRACT:
An anti-corrosion shower head used in a dry etching tool comprises an aluminum base and a ceramic plate embedded in the aluminum base, wherein the ceramic plate has a number of gas holes to spray the etching gas. An oxalic acid is used for electroplating the shower head, and also the aluminum part on the rear side of the ceramic plate or engineering polymer plate is hollowed.
REFERENCES:
patent: 5916720 (1999-06-01), Springett
patent: 6527368 (2003-03-01), Giri et al.
patent: 2002/0015081 (2002-02-01), Okazaki et al.
patent: 2002/0056698 (2002-05-01), Makigaki et al.
patent: 09239994 (1997-09-01), None
NB920643-IBM Disclosuure Doucument: Fabrication of Ink JEt Printer HEad Compnents by Thrrough Mask Electrochamical Micromachining, IBM Technical Disclosure Bulletin, Jun. 1992 vol. 35, Issue 1B, pp. 453-454.
Hsu Ying-Chi
Hu Yung-Hsiang
Kuo Hao-Chi
Shih Cheng-Lung
Hogan James S.
Scherbel David A.
Thomas Kayden Horstemeyer & Risley
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