Antenna-coupled microbolometer

Details Antenna-coupled microbolometer Antenna-coupled microbolometer

2007-04-03

2007-04-03

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Temperature control of photocell

C250S2140RC

Reexamination Certificate

active

10525074

ABSTRACT:
An antenna-coupled microbolometer multilayer structure, and associated method of forming an antenna-coupled microbolometer multilayer structure are disclosed, where the structure includes a dielectric layer of dielectric material having at least one locally doped region doped with a dopant to provide a thermal conductive path from a first side to a second side of the dielectric layer. The structure includes an antenna on the first side of the dielectric layer coupled to the locally doped region; a read-out integrated circuit (ROIC) on the second side of the dielectric layer coupled to the locally doped region; a conductive substrate between the dielectric layer and the ROIC; and an electrical connection between the locally doped region and the ROIC, wherein the ROIC is connected to detect, via the electrical connection, a change in electrical resistivity of the locally doped region due to thermal energy absorbed from the antenna.

REFERENCES:
patent: 5123039 (1992-06-01), Shoulders
patent: 6329649 (2001-12-01), Jack et al.

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