Anodically bonded cell, method for making same and systems...

Oscillators – Molecular or particle resonant type

Reexamination Certificate

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C331S003000

Reexamination Certificate

active

07400207

ABSTRACT:
A cell suitable for use with an atomic clock and a method for making the same, the cell including: a silicon wafer having a recess formed therein; at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon sealing the recess; and, an alkali metal containing component and buffer gas contained in the recess. The method includes: providing a silicon wafer; forming a cavity through the silicon wafer; introducing an alkali metal containing component and buffer gas into the cavity; and, anodically bonding at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon to the wafer to close the cavity.

REFERENCES:
patent: 5327105 (1994-07-01), Liberman et al.
patent: 5670914 (1997-09-01), Liberman et al.
patent: 6320472 (2001-11-01), Vanier
patent: 6570459 (2003-05-01), Nathanson et al.
patent: 2004/0233003 (2004-11-01), Happer et al.
patent: 2005/0236460 (2005-10-01), Abbink et al.

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